Low energy ion induced secondary electron emission coefficient of magnesium oxide films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 249, Issue 1-2 SPEC. ISS., 2006, Pages 440-443

  Morimoto, Yasuhiko ^a   Tanaka, Yoshikazu ^a,b   Ide Ektessabi, Ari ^a  

^a KYOTO UNIVERSITY   (Japan)

^b Sanwa Kenma Ltd   (Japan)

Author keywords

IBAD; MgO film; PDPs; Secondary electron emission coefficient

Indexed keywords

CRYSTAL ORIENTATION; ION BEAM ASSISTED DEPOSITION; MAGNESIA; NANOTECHNOLOGY; PLASMA APPLICATIONS; SECONDARY EMISSION;

MGO FILMS; PDP; SECONDARY ELECTRON EMISSION COEFFICIENTS; SMOOTH FILMS;

THIN FILMS;

EID: 33745854828     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.03.026     Document Type: Article

References (14)

1. Boeuf J.P. J. Phys. D: Appl. Phys. 36 (2003) R53
2. Urade T., Iemori T., Osawa M., Nakayama N., and Morita I. IEEE Trans. Electron. Dev. 23 (1976) 313
3. Zepeda-Ruiz L.A., and Srolovits D.J. J. Appl. Phys. 91 (2002) 10169
4. Oleszkiewicz W., and Romiszowski P. Vacuum 70 (2003) 347
5. Ensinger W. Nucl. Instr. and Meth. B 106 (1995) 142
6. Ektessabi A.M., Sato S., Kitamura H., and Masaki Y. Vacuum 44 (1993) 213
7. Ektessabi A.M. Nucl. Instr. and Meth. B 99 (1995) 610
8. Ide-Ektessabi A., Nomura H., Yasui N., and Tsukuda Y. Thin Solid Films 447-448 (2004) 383
9. Yasui N., Nomura H., and Ide-Ektessabi A. Thin Solid Films 447-448 (2004) 377
10. Kim D.I., FLim J.Y., Kim Y.G., Ko J.J., Lee C.W., Cho G.S., and Choi E.H. Jpn. J. Appl. Phys. 39 (2000) 1890
11. Hagstrum H.D. Phys. Rev. 96 (1954) 336
12. Hagstrum H.D. Phys. Rev. 122 (1961) 83
13. Moon K.S., Lee J., and Whang K.W. J. Appl. Phys. 86 (1999) 4049
14. Ziegler J.F., Biersak J.P., and Littmark U. The Stopping and Range of Ions in Matter (1985), Pergamon Press