Ion beam processing of MgO thin films

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 383-387

  Ide Ektessabi, Ari ^a   Nomura, Hiroshi ^a   Yasui, Nobuto ^a   Tsukuda, Yuji ^b  

^a KYOTO UNIVERSITY   (Japan)

^b Sanwa Kenma Ltd   (Japan)

Author keywords

Ion beam assisted deposition; Magnesium oxide; Plasma display panel; Rutherford backscattering spectroscopy; X Ray diffraction

Indexed keywords

COMPOSITION; CRYSTAL ORIENTATION; CURRENT DENSITY; ELECTRON CYCLOTRON RESONANCE; FILM GROWTH; ION BEAM ASSISTED DEPOSITION; ION BOMBARDMENT; PLASMA DISPLAY DEVICES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SECONDARY EMISSION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

ELECTRON EMISSION COEFFICIENTS; PLASMA DISPLAY PANELS;

MAGNESIA;

EID: 1342344860     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01092-7     Document Type: Conference Paper

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