Piezoelectrical elements for microoptical applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3276, Issue , 1998, Pages 230-243

  Goetz, Bernt ^a   Martin, Thomas ^a   Buecker, Peter ^a  

^a PJP GmbH   (Germany)

Author keywords

Fast switching; Intensity modulators; Micro Opto Electro Mechanical systems (MOEM); Microoptics; Optical fiber switches; Passive damping; Piezoelectrical actautor

Indexed keywords

CHOPPERS (CIRCUITS); CIRCUIT OSCILLATIONS; DAMPING; LIGHT MODULATORS; MICROACTUATORS; NATURAL FREQUENCIES; OPTICAL SWITCHES; PIEZOELECTRIC MATERIALS; SWITCHING;

MICRO-OPTO-ELECTRO-MECHANICAL SYSTEMS (MOEM);

MICROOPTICS;

EID: 0032225659     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.302400     Document Type: Conference Paper

References (6)

1. Micro-optic laser beam scanner
2. The potential of transmittive microoptical systems for miniaturized scanners, modulators and switches
3. Miniaturized fiber-optic switches for optical metrology and optical communication
4. Miniaturized optical systems for beam deflection and modulation
5. Miniaturized optical switches based on piezoelectrically driven microprism arrays
6. Micro-opto-mechanical beam deflectors