Investigation On Different Passivation Technologies For Thin Film Sensors On Ceramic Substrates

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 617-622

  Schmid, U ^a   Krotz G ^a  

^a AIRBUS GROUP INNOVATIONS   (Germany)

Author keywords

a SiC:H; Diamond; Flow sensor; Injection system; Passivation; Thin film

Indexed keywords

AMORPHOUS MATERIALS; CERAMIC MATERIALS; COATING TECHNIQUES; DELAMINATION; DIAMONDS; ETCHING; GLASS; HYDROGEN; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA JETS; SILICON CARBIDE; SPECIFIC HEAT; THIN FILMS;

A-SIC:H; FLOW SENSORS; INJECTION SYSTEMS;

SENSORS;

EID: 1542271582     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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