The lithographic lens; its history and evolution

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6154 I, Issue , 2006, Pages

  Matsuyama, Tomoyuki ^a   Ohmura, Yasuhiro ^a   Williamson, David M ^b  

^a NIKON CORPORATION   (Japan)

^b 12490 North Rancho Vistoso Boulevard   (United States)

Author keywords

Immersion; Microlithography; Projection lens

Indexed keywords

ABERRATIONS; INTERFEROMETRY; LIGHT POLARIZATION; OPTICAL DESIGN; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY;

IMMERSION; NUMERICAL APERTURE (NA); PROJECTION LENS;

OPTICAL INSTRUMENT LENSES;

EID: 33745799031     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656163     Document Type: Conference Paper

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