How to describe polarization influence on imaging

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5754, Issue PART 1, 2005, Pages 23-37

  Totzeck, M ^a   Graupner P ^a   Heil, T ^a   Gohnermeier A ^a   Dittmann, O ^a   Krahmer D ^a   Kamenov, V ^a   Ruoff, J ^a   Flagello, D ^b  

^a CARL ZEISS SMT AG   (Germany)

^b ASML US Inc   (United States)

Author keywords

Aberrations; Hyper NA imaging; Lithography; Polarization; Zernike polynomials

Indexed keywords

CONTRAST LOSS; HYPER-NA IMAGING; ZERNIKE-POLYNOMIALS;

ABERRATIONS; COMPUTER SIMULATION; LIGHT POLARIZATION; NUMERICAL METHODS; OPTICAL SYSTEMS; POLYNOMIALS;

IMAGING SYSTEMS;

EID: 22144433305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.599908     Document Type: Conference Paper

References (17)

1. B. J. Lin, "Immersion lithography and its impact on semiconductor manufacturing", JM3, 3 (2004) 377-95.
2. D. G. Flagello, S. Hansen, B. Geh, M. Totzeck, "Challenges with hyper-NA (NA>1.0) polarized light lithography for sub λ/4 resolution", this proceedings.
3. Y. Unno, "Influence of birefringence on the image formation of high-resolution projection optics", Appl. Opt. 39 (2000) 3243-3252.
4. M. Shribak, S. Inoue, R. Oldenbourg, "Polarization aberrations caused by differential transmission and phase shift in high numerical-aperture lenses: theory, measurement, and rectification", Opt. Eng. 41 (2002) 943-954.
5. W. Urbanczyk, "Optical imaging in polarized light", Optik 63 (1982) 25-35
6. and "Optical imaging systems changing the state of light polarization", Optik 66 (1984) 301-309.
7. R.A.Chipman, "Polarization analysis of optical systems", Opt. Eng. 28 (1989) 90-99.
8. J.P. McGuire, R.A. Chipman, "Polarization aberrations. 1. Rotationally symmetric optical systems", Appl. Opt. 33 (1994) 5080-5100.
9. D. G. Flagello, T. Milster, A. E. Rosenbluth, "Theory of high-NA imaging in homogeneous thin films", J. Opt. Soc. Am. A 13 (1996) 58-64.
10. nd ed. (McGraw-Hill, New York, 1996), p. 55ff.
11. M.Totzeck, O. Dittmann, A. Göhnermeier, V. Kamenov, B. Geh, D. Krähmer, A.Rosenbluth, Kafai Lai, "Suggestion of a file-format for Jones pupil data", Memo 2005.
12. R. Barakat, "Jones matrix equivalence theorems for polarization theory", Eur. J. Phys. 19 (1998) 209-216.
13. Y. Unno, "Distorted wave front produced by a high-resolution projection optical system having rotationally symmetric birefringence", Appl. Opt. 37 (1998) 7241-7247.
14. S. Stallinga, "Axial birefringence in high-numerical-aperture optical systems and the light distribution close to focus", J. Opt. Soc. Am. A 18 (2001) 2846-2858.
15. S.Y. Lu, R.A. Chipman, "Homogeneous and inhomogeneous Jones matrices", J.Opt.Soc.Am. A 11 (1994) 766-773.
16. W.H. Press, S.A. Teukolsky, W.T. Vetterling, B.P. Flannery, "Numerical Recipes in C", 2nd Ed. (Cambridge University Press, 1994), p. 59 ff.
17. M. Born, E.Wolf, Principles of Optics, 6th edition (Pergamon, Oxford, 1980).