Improving lens performance through the most recent lens manufacturing process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5040 II, Issue , 2003, Pages 801-810

  Matsuyama, Tomoyuki ^a   Tanaka, Issey ^a   Ozawa, Toshihiko ^a   Nomura, Kazushi ^a   Koyama, Takashi ^a  

^a NIKON CORPORATION   (Japan)

Author keywords

ArF projection lens; Lens manufacturing; Metrology

Indexed keywords

ABERRATIONS; BIREFRINGENCE; COMPUTER SIMULATION; COMPUTER SOFTWARE; LIGHTING; LITHOGRAPHY; OPTICAL DESIGN;

DEEP ULTRAVIOLET PROJECTION LENS SYSTEM; OPT-MECHANICAL DESIGN; PHASE-MEASUREMENT INTERFEROMETER;

OPTICAL INSTRUMENT LENSES;

EID: 0141610602     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.485461     Document Type: Conference Paper

References (5)

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2. C. Progler and D. Wheeler, "Optical lens specifications from the user's perspective", SPIE Vol. 3334, 1998.
3. E. Hecht, Optics, 2nd ed, pp. 352-354 (Addison-Wesley, Reading, Mass. 1990).
4. E. Hecht, Optics 2nd ed, pp. 385-386 (Addison-Wesley, Reading, Mass. 1990).
5. D. Williamson, "Compensator selection in the tolerancing of a Microlithographic lens", SPIE Vol. 1049, 1989.