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Volumn 80, Issue 1, 2006, Pages 395-405

Characteristic of (100)-textured (PbxSr1-x )TiO 3 thin films used for DRAM and tunable device application

Author keywords

DRAM; Figure of merit; LNO; PST; Tunable

Indexed keywords

CRYSTALLIZATION; DEPOSITION; ELECTRODES; MAGNETRON SPUTTERING; PERMITTIVITY; SUBSTRATES; THIN FILMS; TITANIUM COMPOUNDS;

EID: 33745745122     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600663110     Document Type: Article
Times cited : (5)

References (11)
  • 3
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  • 5
    • 0038297129 scopus 로고    scopus 로고
    • High tunability in compositionally graded epitaxial barium strontium titanate thin films by pulsed-laser deposition
    • S. G. Lu, X. H. Zhu, C. L. Mak, K. H. Wong, H. L. W. Chan, and C. L. Choy, "High Tunability in Compositionally Graded Epitaxial Barium Strontium Titanate Thin Films by Pulsed-Laser Deposition," Appl. Phys. Lett. 82, 2877-2879 (2003).
    • (2003) Appl. Phys. Lett. , vol.82 , pp. 2877-2879
    • Lu, S.G.1    Zhu, X.H.2    Mak, C.L.3    Wong, K.H.4    Chan, H.L.W.5    Choy, C.L.6
  • 6
    • 0035881417 scopus 로고    scopus 로고
    • 3 thin films prepared by liquid source misted chemical deposition for Ultra Large-Scale Integration (ULSI) Dynamic Random Access Memory (DRAM) capacitor
    • 3 Thin Films Prepared by Liquid Source Misted Chemical Deposition for Ultra Large-Scale Integration (ULSI) Dynamic Random Access Memory (DRAM) Capacitor," Thin Solid Film 394, 212-217 (2001).
    • (2001) Thin Solid Film , vol.394 , pp. 212-217
    • Chung, H.J.1    Chung, S.J.2    Kim, J.H.3    Woo, S.I.4
  • 8
    • 0035082228 scopus 로고    scopus 로고
    • 3 thin films for ultra-large-scale-integrated dynamic random access memory capacitors prepared by liquid-source misted chemical deposition
    • 3 Thin Films for Ultra-Large-Scale-Integrated Dynamic Random Access Memory Capacitors Prepared by Liquid-Source Misted Chemical Deposition," J. Vac. Sci. Technol. B19, 275-280 (2001).
    • (2001) J. Vac. Sci. Technol. , vol.B19 , pp. 275-280
    • Chung, H.J.1    Woo, S.I.2
  • 9
    • 0037011103 scopus 로고    scopus 로고
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    • 3 Thin Films for Tunable Microwave Device," Thin Solid Films 420, 544-547 (2002).
    • (2002) Thin Solid Films , vol.420 , pp. 544-547
    • Kim, K.T.1    Kim, C.I.2
  • 11
    • 0037391867 scopus 로고    scopus 로고
    • 3 thin films fabricated by sol-gel method
    • 3 Thin Films Fabricated by Sol-Gel Method," Microelectronic Engineering 66(1-4), 835-841 (2003).
    • (2003) Microelectronic Engineering , vol.66 , Issue.1-4 , pp. 835-841
    • Kim, K.T.1    Kim, C.I.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.