Thermodynamics on hydride vapor phase epitaxy of AlN using AlCl3 and NH3

Physica Status Solidi (B) Basic Research

Volumn 243, Issue 7, 2006, Pages 1431-1435

  Kumagai, Y ^a   Takemoto, K ^a   Kikuchi, J ^a   Hasegawa, T ^b   Murakami, H ^a   Koukitu, A ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33745736443     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.200565208     Document Type: Conference Paper

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