Swift chemical sputtering of covalently bonded materials

Pure and Applied Chemistry

Volumn 78, Issue 6, 2006, Pages 1203-1211

  Nordlund, K ^a   Salonen, E ^b   Krasheninnikov, A V ^a   Keinonen, J ^a  

^a UNIVERSITY OF HELSINKI   (Finland)

^b HELSINKI INSTITUTE OF PHYSICS   (Finland)

Author keywords

Bond breaking; Covalently bonded materials; Erosion; Plasma surface interactions; Sputtering

Indexed keywords

EID: 33745685242     PISSN: 00334545     EISSN: None     Source Type: Journal    
DOI: 10.1351/pac200678061203     Document Type: Conference Paper

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