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Volumn 25, Issue 3, 2002, Pages 427-434
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Sputtering of amorphous hydrogenated carbon by hyperthermal ions as studied by tight-binding molecular dynamics
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Author keywords
Interactions of atoms with surfaces; Plasma material interaction; Semi empirical and empirical calculations; Tight binding molecular dynamics
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Indexed keywords
AMORPHOUS MATERIALS;
COMPUTER SIMULATION;
EROSION;
HYDROGENATION;
IONS;
MOLECULAR DYNAMICS;
QUANTUM THEORY;
SPUTTERING;
HYPERTHERMAL IONS;
DIMERS;
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EID: 0036830505
PISSN: 09270256
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0256(02)00318-X Document Type: Article |
Times cited : (31)
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References (26)
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