Generation of air microplasma jet and its application to local etching of polyimide films

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 6 B, 2006, Pages 5618-5623

  Yoshiki, Hiroyuki ^a  

^a TSURUOKA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

Author keywords

Air microplasma jet; Local etching; Polyamide imide copper winding wire; Polyimide films; RF discharge; Surgical needle

Indexed keywords

ATMOSPHERIC PRESSURE; CHEMICAL REACTIONS; ETCHING; POLYIMIDES; STAINLESS STEEL; SURGICAL EQUIPMENT;

AIR MICROPLASMA JET; LOCAL ETCHING; POLYAMIDE-IMIDE COPPER WINDING WIRE; POLYIMIDE FILMS; RF DISCHARGE; SURGICAL NEEDLE;

PLASMA JETS;

EID: 33745650265     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.5618     Document Type: Review

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