Optimization of EUV/SXR plasma radiation source characteristics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  MacFarlane, J J ^a   Wang, P ^a   Golovkin, I E ^a   Woodruff, P R ^a  

^a Prism Computational Sciences Inc   (United States)

Author keywords

Atomic physics; Atomic spectroscopy; EUV lithography; Laser produced plasmas; Radiation transport; Radiation hydrodynamics; Spectral analysis

Indexed keywords

ATOMIC PHYSICS; ATOMIC SPECTROSCOPY; FLUXES; HYDRODYNAMICS; LASER BEAMS; LASER PULSES; LITHOGRAPHY; MEDICAL APPLICATIONS; PLASMA HEATING; PLASMA SIMULATION; PLASMAS; RADIATION; SEMICONDUCTOR MATERIALS; SPECTRUM ANALYSIS;

EUV LITHOGRAPHY; RADIATION TRANSPORT; RADIATION-HYDRODYNAMICS; SPHERICAL DROPLETS;

LASER PRODUCED PLASMAS;

EID: 33745628031     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655690     Document Type: Conference Paper

References (18)

1. Y. Watanabe, K. Ota, and H. Franken., "Source Requirements for EUV Lithography," SEMATECH International EUV Source Workshop, Santa Clara, CA (2004).
2. U. Stamm, et al., "High Power EUV Sources for Lithography - A Comparison of Laser-Produced plasma and Gas Discharge Produced Plasma," Proc. SPIE 4688, 133, Emerging Lithographic Technologies VI (2002).
3. C. Rettig, I. Fomenkov, and J. J. MacFarlane, "Computational Predictions of Laser-Produced Plasma EUV Source Performance," presented at the EUVL Source Modeling Workshop, Miyazaki, Japan (2004).
4. M. Richardson, C. S. Koay, K. Takenoshita, C. Keyser, and M. Al-Rabban, "High Conversion Efficiency MassLimited Sn-Based Laser Plasma Source for Extreme Ultraviolet Lithography," J. Vac. Sci. Technol. B 22, 785 (2004).
5. Y. Shimada, et al., "Characterization of Extreme Ultraviolet Emission from Laser-Produced Spherical Tin Plasma Generated with Multiple Laser Beams," Appl. Phys. Lett. 86,051501 (2005).
6. J. J. MacFarlane, et al, "Dopant Radiative Cooling Effects in Indirect-Drive Capsule Implosion Experiments," Phys. Rev. E, in press (2006).
7. I. E. Golovkin, et al., "Spectroscopic Analysis and NLTE Radiative Cooling Effects in ICF Capsule Implosions with Mid-Z Dopants," J. Quant. Spectrosc. Radiat. Transfer 99, 199 (2006).
8. J. Bailey, et al., "Dynamic Hohlraum Radiation Hydrodynamics," Phys. Plasmas, in press (2006).
9. J. J. MacFarlane, et al, "Simulation of the Ionization Dynamics of Aluminum Irradiated by Intense Short-Pulse Lasers, "Proc. Inertial Fusion and Sciences Applications 2003,457, Amer. Nucl. Soc. (2004).
10. J. J. MacFarlane, I. E. Golovkin, and P. R. Woodruff, "HELIOS-CR - A 1-D Radiation-Magnetohydrodynamics Code with Inline Atomic Kinetics Modeling," J. Quant. Spectrosc. Radiat. Transfer 99,381 (2006).
11. J. J. MacFarlane, C. L. Rettig, P. Wang, I. E. Golovkin, and P. R. Woodruff, "Radiation-Hydrodynamics, Spectral, and Atomic Physics Modeling of Laser-Produced Plasma EUV Light Sources, " in Emerging Lithographic Technologies IX, Proc. of SPIE, Vol. 5751 (2005).
12. J. J. MacFarlane, et al, "13.5 nm Conversion Efficiencies for Tin Laser-Produced Plasmas: Dependence on Laser Wavelength," presented at the EUVL Source Modeling Workshop, San Diego, CA (2005).
13. J. J. MacFarlane, I. E. Golovkin, and P. R. Woodruff, "2-D Radiation-Hydrodynamics Simulations of Spherical Tin Plasmas," Prism Computational Sciences Report PCS-R-063 (2005).
14. J. J. MacFarlane, P. Woodruff, and I. E. Golovkin, "Spect3D Imaging and Spectral Analysis Suite, " Prism Computational Sciences Report No. PCS-R-045 (2003).
15. S. P. Lyon, J. D. Johnson, "SESAME: The Los Alamos National Laboratory Equation of State Database," Technical report LA-UR-92-3407, Los Alamos National Laboratory, Los Alamos, NM (1992).
16. D. G. Hummer, and D. Mihalas, "The Equation of State for Stellar Envelopes. I. An Occupation Probability Formalism for the Truncation of Internal Partition Functions," Astrophys J. 331, 794 (1988).
17. R. M. More, Applied Atomic Collision Physics, vol. 2, Academic Press, New York (1982).
18. Additional information on major features of these plasma simulation tools is provided at http://www.prism-cs.com.