High power low cost drive laser for LPP source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Fomenkov, Igor V ^a   Hansson, Björn A M ^a   Böwering, Norbert R ^a   Ershov, Alex I ^a   Partlo, William N ^a   Fleurov, Vladimir B ^a   Khodykin, Oleh V ^a   Bykanov, Alexander N ^a   Rettig, Curtis L ^a   Hoffman, Jerzy R ^a   Vargas L , Ernesto ^a   Chavez, Juan A ^a   Marx, William F ^a   Brandt, David C ^a  

^a CYMER INC   (United States)

Author keywords

CO 2 laser amplifier; EUV source; Laser produced plasma; Nd:YLF seed; XeF power amplifier

Indexed keywords

AXIAL FLOW; COST BENEFIT ANALYSIS; DIFFRACTION; HARMONIC ANALYSIS; HIGH POWER LASERS; LASER BEAMS; LASER PULSES; LIGHT AMPLIFIERS; OSCILLATORS (MECHANICAL); POWER AMPLIFIERS;

CO2 LASER AMPLIFIERS; EUV SOURCES; ND:YLF SEED; XEF POWER AMPLIFIERS;

LASER PRODUCED PLASMAS;

EID: 33745618404     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655733     Document Type: Conference Paper

References (11)

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