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ECS Transactions

Volumn 2, Issue 2, 2006, Pages 109-122

Wafer strength and slip generation behavior in 300mm wafers

(4) Ono, Toshiaki a Sugimura, Wataru a Kihara, Takayuki a Hourai, Masataka a

a SUMCO CORPORATION (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRACKS; DISLOCATIONS (CRYSTALS); ELECTROCHEMISTRY; IMPURITIES; PRECIPITATION (CHEMICAL); STRENGTH OF MATERIALS;

DISLOCATION PROPAGATION; IMPURITY CONCENTRATION; OXYGEN PRECIPITATION; SLIP GENERATION BEHAVIOR;

WSI CIRCUITS;

EID: 33745459539 PISSN: 19385862 EISSN: 19386737 Source Type: Conference Proceeding
DOI: 10.1149/1.2195653 Document Type: Conference Paper

Times cited : (13)

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