Investigation of a-Si:H 1D MIS position sensitive detectors for application in 3D sensors

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1787-1791

  Aguas H ^a   Pereira, L ^a   Raniero, L ^a   Costa, D ^a   Fortunato, E ^a   Martins, R ^a  

^a DEPARTAMENTO DE CIÊNCIA DOS MATERIAIS   (Portugal)

Author keywords

Plasma deposition; Sensors; Silicon

Indexed keywords

OPTICAL RESOLVING POWER; SEMICONDUCTOR DEVICES; SIGNAL TO NOISE RATIO; TRACKING (POSITION); TRANSFER FUNCTIONS;

JONES PARAMETER; MODULATION TRANSFER; PLASMA DEPOSITION; TRANSVERSE RESOLUTION;

SILICON SENSORS;

EID: 33745444243     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.09.042     Document Type: Article

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