Chemical solution deposition of (Pb1-xCax)TiO 3 thin films with x∼0.5 as new dielectrics for tunable components and dynamic random access memories

Journal of the American Ceramic Society

Volumn 88, Issue 12, 2005, Pages 3388-3396

  Calzada, M L ^a   Bretos, I ^a   Jimenez R ^a   Ricote, J ^a   Mendiola, J ^a   Garcia Lopez J ^b   Respaldiza, M A ^b  

^a INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CALCIUM COMPOUNDS; DEPOSITION; DIELECTRIC LOSSES; DIELECTRIC MATERIALS; DYNAMIC RANDOM ACCESS STORAGE; ELECTRODES; HYDRATES; LEAD COMPOUNDS; LEAKAGE CURRENTS; PERMITTIVITY; REACTION KINETICS; TITANIUM OXIDES;

CHEMICAL SOLUTION DEPOSITION (CSD); DIOL-WATER SOLVENTS; LOW DIELECTRIC LOSSES; TUNABLE DEVICES;

THIN FILMS;

EID: 33745328314     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2005.00644.x     Document Type: Article

References (42)

1. A. I. Kingon, J. P. Maria, and S. K. Streiffer, "Alternative Dielectrics to Silicon Dioxide for Memory and Logic Devices," Nature, 406, 1032-8 (2000).
2. D. Dimos and C. H. Mueller, "Perovskite Thin Films for High-Frequency Capacitor Applications," Ann. Rev. Mater. Sci., 28, 397-419 (1998).
3. J. Hao, W. Si, and X. X. Xi, "Dielectric Properties of Pulsed-Laser-Deposited Calcium Titanate Thin Films," Appl. Phys. Lett., 76 [21] 3100-2 (2000).
4. 3 Solid Solutions," Appl. Phys. Lett., 81 [5] 886-8 (2002).
5. J. Mendiola, B. Jiménez, C. Alemany, L. Pardo, and L. del Olmo, "Influence of Calcium on the Ferroelectricity of Modified Lead Titanate Ceramics," Ferroelectrics, 94, 183-8 (1989).
6. 3) Ceramics for Surface Acoustic Wave Applications," Appl. Phys. Lett, 35, 595-7 (1979).
7. 3 Ceramics," Jpn. J. Appl. Phys., 26, 57-60 (1987).
8. D. Damjanovic, T. G. Gururaja, and L. E. Cross, "Anisotropy in Piezoelectric Properties of Modified Lead Titanate Ceramics," Am. Ceram. Soc. Bull., 66, 699-703 (1987).
9. K. M. Rittenmyer and R. Y. Ting, "Piezoelectric and Dielectric Properties of Calcium and Samarium Modified Lead Titanate Ceramics for Hydroacoustic Applications," Ferroelectrics., 110, 171-82 (1990).
10. 3 Ferroelectric Ceramics Above the Phase-Transition Temperature," Phys. Rev. B, 66, 014104-1-7 (2002).
11. I. W. Su, C. C. Chou, and D. S. Tsai, "Octahedral Tilting Domain Boundary in Calcium-Modified Lead Titanate Ceramics," Integrated Ferroelect., 48, 69-78 (2002).
12. 3: A Rietveld Study," J. Mater. Res., 18 [2] 407-14 (2003).
13. 3," Appl. Phys. Lett., 70 [24] 3221-3 (1997).
14. 3 Thin Film Grown by Radio-Frequency Magnetron Sputtering," J. Vac. Sci. Technol. A, 6 [5] 2921-8 (1988).
15. 3 Thin Films," J. Appl. Phys., 91 [10] 6650-5 (2002).
16. 3 Thin Films Determined by Spectroscopic Ellipsometry," Solid State Comm., 114, 347-50 (2000).
17. A. L. Kholkin and M. L. Calzada, "Calcium Modified Lead Titanate Thin Films for Electromechanical Applications," J. Phys. IV France, 8, 195-8 (1998).
18. 3 Thin Films," J. Mater. Sci. Lett., 10, 125-8 (1991).
19. 3-Based Thin Films." J. Mater. Sci. Lett., 13, 1364-6 (1994).
20. R. Sirera, M. L. Calzada, F. Carmona, and B. Jiménez, "Ferroelectric Thin Films of Calcium Modified Lead Titanate by Sol-Gel Processing," J. Mater. Sci. Lett., 13, 1804-5 (1994).
21. R. Sirera and M. L. Calzada, "Multicomponent Solutions for the Deposition of Modified Lead Titanate Films," Mater. Res. Bull., 30 [1] 11-8 (1995).
22. H. Shen, J. Chen, and G. Chen, "Seeding Acceleration of Perovskite Crystallization in Lead Calcium Titanate Thin Films," J. Non-Cryst. Solids, 220, 231-4 (1997).
23. C. M. Wang, Y. T. Huang, Y. C. Chen, M. S. Lee, and M. C. Kao, "Characterization of Calcium-Modified Lead Titanate Thin Films Derived From a Diol-Based Sol-Gel Process," Jpn. J. Appl. Phys., 39, 3579-83 (2000).
24. D. S. L. Pontes, E. R. Leite, F. M. Pontes, E. Longo, and J. A. Varela, "Microstructural, Dielectric and Ferroelectric Properties of Calcium-Modified Lead Titanate Thin Films Derived by Chemical Processes," J. Eur. Ceram. Soc., 21, 1107-14 (2001).
25. 3 Thin Films," Appl. Phys. A, 78, 349-54 (2004).
26. 3 Thin Films," J. Mater. Sci., 32 [3] 575-82 (1997).
27. 3 Thin Films Using a Modified Sol-Gel Technique," Thin Solid Films, 350, 30-7 (1999).
28. 3 Thin Films with Enhanced Dielectric and Ferroelectric Properties," Appl. Phys. Lett., 76 [8] 1063-5 (2000).
29. 3 Films With High Ca Doping." Thin Solid Films, 450, 211-5 (2004).
30. 3 Thin Films With x∼0.5 for Electronic Applications"; Proceedings of First International Meeting of Applied Physics, October 2003. Badajoz-Spain, in press.
31. 3," J. Mater. Chem., 1 [5] 893-4 (1991).
32. N. J. Phillips, M. L. Calzada, and S. J. Milne, "Sol-Gel-Derived Lead Titanate Films," J. Noit-Cryst. Solids. 147-148, 285-90 (1992).
33. R. Sirera, "Síntesis Por Sol-Gel De Soluciones De Titanato De Plomo Modificado Para La Preparación De Láminas Delgadas Ferroeléctricas"; Ph.D. Thesis. University Autonoma de Madrid, 1997.
34. C. C. Hsueh and M. L. Mecartney, "Microstructural Development and Electrical Properties of Sol-Gel Prepared Lead Zirconate-Titanate Thin Films," J. Mater. Res., 6 [10] 2208-17 (1991).
35. M. L. Calzada and R. Sirera, "Chemically Derived Ferroelectric Calcium Modified Lead Titanate Thin Films Deposited From Aquo-Diol-Solvent- Solutions," J. Mater. Sci. Mater. Elect., 7, 39-45 (1996).
36. L. R. Doolittle, "A Semiautomatic Algorithm for Rutherford Backscattering Analysis," Nucl. Instrum. Meth. 1985, 15 [1-6] 227-31 (1986).
37. A. G. Fredrickson, Principles and Applications of Rheology. Prentice-Hall Inc., Englewood Cliffs, NJ, 1964.
38. M. L. Calzada, B. Malic, R. Sirera, and M. Kosec, "Thermal- Decomposition Chemistry of Modified Lead-Titanate Aquo-Diol Gels Used for the Preparation of Thin Films," J. Sol-Gel Sci. Technol., 23, 221-30 (2002).
39. B. Malic, M. Kosec, K. Smolej, and S. Stavber, "Processing of High Performance Lead Lanthanum Zirconate Titanate Thick Films," J. Eur. Ceram. Soc., 19, 1345-8 (1999).
40. 3 Piezoelectric Ceramics and their Applications," Jpn. J. Appl. Phys., 20, 183-7 (1981).
41. 3 Thin Films Using a Highly Diluted Precursor Solution," Appl. Phys. Lett., 75 [14] 2132-4 (1999).
42. J. F. Scott, "Basic Properties of RAMs"; pp. 23-50 in Ferroelectric Memories. Springer Series in Advanced Microelectronics, Edited by K. Itoh and T. Sakurai. Springer-Verlag, Berlin, 2000.