Growing cubic boron nitride films at different temperatures

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 1155-1160

  Chong, Y M ^a   Leung, K M ^a   Ma, K L ^a   Zhang, W J ^a   Bello, I ^a   Lee, S T ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Chemical vapor deposition; Cubic boron nitride; Fluorine chemistry; Physical vapor deposition

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; CUBIC BORON NITRIDE; NITRIDES; PHYSICAL VAPOR DEPOSITION; THERMAL EFFECTS; THIN FILMS;

FACETED SURFACES; FLUORINE CHEMISTRY; PHASE PURITY; TEMPERATURE PARAMETER;

DIELECTRIC FILMS;

EID: 33745240921     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.09.016     Document Type: Article

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