New aspects of the plastic deformation of silicon - prerequisites for the reshaping of silicon microelements

Applied Physics A: Materials Science and Processing

Volumn 68, Issue 6, 1999, Pages 673-679

  Fruhauf J ^a   Gartner E ^a   Jansch E ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); ELASTIC MODULI; ETCHING; FRACTURE TOUGHNESS; HIGH TEMPERATURE EFFECTS; MECHANICAL PROPERTIES; PHYSICAL PROPERTIES; PLASTIC DEFORMATION; STATISTICAL METHODS; WEIBULL DISTRIBUTION;

RESHAPING; SILICON MICROELEMENT; WET ETCHING;

SILICON;

EID: 0343189338     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390050959     Document Type: Article

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