Ultradense GaN nanopillar and nanopore arrays by self-assembly nanopatterning

Journal of Electronic Materials

Volumn 35, Issue 5, 2006, Pages 1133-1137

  Kouklin, N A ^a   Liang, J ^b  

^a University of Wisconsin Milwaukee   (United States)

^b WORCESTER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Array; GaN; Patterning

Indexed keywords

NANOPILLARS; NANOPORES; PATTERNING; TEMPLATES;

ARRAYS; DEPOSITION; DRY ETCHING; FAST FOURIER TRANSFORMS; GALLIUM NITRIDE; SELF ASSEMBLY;

NANOTECHNOLOGY;

EID: 33745102358     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02692577     Document Type: Conference Paper

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