Optimization of deposition uniformity for large-aperture National Ignition Facility substrates in a planetary rotation system

Applied Optics

Volumn 45, Issue 13, 2006, Pages 3097-3105

  Oliver, James B ^a   Talbot, David ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; DEPOSITION; ERROR DETECTION; MASKS; MULTILAYERS; OPTIMIZATION; ORBITS; PHOTOMETERS; ROTATION; SUBSTRATES; THICKNESS CONTROL;

ERROR TOLERANCES; MULTILAYER COATINGS; NATIONAL IGNITION FACILITY; PLANETARY ROTATION SYSTEM;

IGNITION;

EID: 33745041322     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.003097     Document Type: Article

References (9)

1. I. C. Stevenson and G. Sadkhin, "Optimum location of the evaporation source: experimental verification," in Proceedings of the 44th Annual Technical Conference of the Society of Vacuum Coaters (Society of Vacuum Coaters, 2001), pp. 306-313.
2. D. J. Smith, A. Staley, R. Eriksson, and G. Algar, "Counter-rotating planetary design for large rectangular substrates," in Proceedings of the 41st Annual Technical Conference of the Society of Vacuum Coaters (Society of Vacuum Coaters, 1998), pp. 193-196.
3. 2 coatings: some key points for high power laser applications," J. Vac. Sci. Technol. A18, 2372-2377 (2000).
4. R. Chow, S. Falabella, G. E. Loomis, F. Rainer, C. J. Stolz, and M. R. Kozlowski, "Reactive evaporation of low-defect density hafnia," Appl. Opt. 32, 5567-5574 (1993).
5. B. S. Ramprasad and T. S. Radha, "Uniformity of film thickness on rotating planetary planar substrates," Thin Solid Films 15, 55-64 (1973).
6. K. H. Behrndt, "Thickness uniformity on rotating substrates," in Transactions of the Tenth National Vacuum Symposium of the American Vacuum Society, G. H. Bancroft, ed. (Macmillan, 1963), pp. 379-384.
7. A. G. Zhiglinskiy and E. S. Putilin, "Optimal conditions for depositing uniform thin films," Opt. Technol. 38, 557-559 (1971).
8. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, 2001), pp. 488-497.
9. A. Musset and I. C. Stevenson, "Obtaining uniformly thick films in coating chambers," in Proceedings of the 31st Annual Technical Conference of the Society of Vacuum Coaters. (Society of Vacuum Coaters, 1988), pp. 203-209.