Counter-rotating planetary design for large rectangular substrates

Proceedings, Annual Technical Conference - Society of Vacuum Coaters

Volumn , Issue , 1998, Pages 193-196

  Smith, D J ^a   Staley, A ^a   Eriksson, R ^a   Algar, G ^a  

^a UNIVERSITY OF ROCHESTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EVAPORATION; PROTECTIVE COATINGS; SUBSTRATES;

THERMAL EVAPORATION;

LASER OPTICS;

EID: 0031623042     PISSN: 07375921     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)