Mapping thermal conductivity using bimetallic atomic force microscopy probes

Applied Physics Letters

Volumn 88, Issue 23, 2006, Pages

  Grover, Ranjan ^a   McCarthy, Brendan ^a   Sarid, Dror ^a   Guven, Ibrahim ^b  

^a UNIVERSITY OF ARIZONA   (United States)

^b University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON CANTILEVER; TOPOGRAPHIC DISTORTION;

ATOMIC FORCE MICROSCOPY; BIMETALS; CANTILEVER BEAMS; COATING TECHNIQUES; FINITE ELEMENT METHOD; LASER BEAMS; MEASUREMENT THEORY; SILICON; SURFACE TOPOGRAPHY; THIN FILM DEVICES;

THERMAL CONDUCTIVITY;

EID: 33745021837     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2210973     Document Type: Article

References (18)

1. V. V. Zhirnov and R. K. Cavin, Proc. IEEE 91, 1934 (2003).
2. T. W. McDaniel, W. A. Challener, and K. Sendur, IEEE Trans. Magn. 39, 1972 (2003).
3. A. Majumdar, J. P. Carrejo, and J. Lai, Appl. Phys. Lett. 62, 2501 (1993).
4. S. Lefevre and S. Volz, Rev. Sci. Instrum. 76, 033701 (2005).
5. O. Kwon, L. Shi, and A. Majumdar, Trans. ASME, Ser. C: J. Heat Transfer 125, 156 (2003).
6. J. Varesi and A. Majumdar, Appl. Phys. Lett. 72, 37 (1998).
7. M. Stopka, E. Oesterschulze, J. Schulte, and R. Kassing, Mater. Sci. Eng., B 24, 226 (1998).
8. M. Nonnenmacher and H. K. Wickramasinghe, Appl. Phys. Lett. 61, 168 (1992).
9. O. Nakabeppu, M. Chandrachood, Y. Wu, J. Lai, and A. Majumdar, Appl. Phys. Lett. 66, 694 (1995).
10. A. Majumdar, J. Lai, M. Chandrachood, O. Nakabeppu, Y. Wu, and Z. Shi, Rev. Sci. Instrum. 66, 3584 (1995).
11. J. K. Gimzewski, C. Gerber, E. Meyer, and R. R. Schlittler, Chem. Phys. Lett. 217, 589 (1994).
12. W.-H. Chu, M. Mehregany, and R. L. Mullen, J. Micromech. Microeng. 3, 4 (1993).
13. W. P. King, T. W. Kenny, and K. E. Goodson, Appl. Phys. Lett. 85, 2086 (2004).
14. S. Gom̀s, N. Trannoy, and P. Grossel, Meas. Sci. Technol. 10, 805 (1999).
15. D. G. Cahill, W. K. Ford, K. E. Goodson, G. D. Mahan, A. Majumdar, H. J. Maris, R. Merlin, and S. R. Phillpot, J. Appl. Phys. 93, 793 (2003).
16. L. Shi and A. Majumdar, J. Heat Transfer 124, 329 (2002).
17. E. T. Swartz, Rev. Mod. Phys. 61, 605 (1989).
18. R. Prasher, Nano Lett. 5, 2155 (2005).