P2 dimer implantation in silicon: A molecular dynamics study

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 251, Issue 2, 2006, Pages 395-401

  Wilson, H F ^a   Prawer, S ^b   Spizzirri, P G ^b   Jamieson, D N ^b   Stavrias, N ^b   McKenzie, D R ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

^b UNIVERSITY OF MELBOURNE   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRON ENERGY LEVELS; ION IMPLANTATION; MOLECULAR DYNAMICS; SILICON;

INTER-DONOR COUPLING EFFECTS; LATTICE-MEDIATED VICINAGE EFFECTS; MOLECULAR DYNAMICS SIMULATIONS;

DIMERS;

EID: 33744825343     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2006.04.172     Document Type: Article

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