Manufacturing of prestressed piezoelectric unimorphs using a postfired biasing layer

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 5, 2006, Pages 838-846

  Juuti, Jari A ^a,b   Jantunen, Heli ^a   Moilanen, Veli Pekka ^a,c   Leppävuori, Seppo ^a,c  

^a UNIVERSITY OF OULU   (Finland)

^b Department of Electrical and Information Engineering ^*  (Finland)

^c Microelectronics and Material Physics Laboratory   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

POSTFIRED BIASING LAYER; PRESTRESSED PIEZOELECTRIC UNIMORPHS; SINTERED BULK CERAMIC; THERMAL SHRINKAGE;

ACTUATORS; CERAMIC MATERIALS; PRINTED CIRCUIT BOARDS; SCREEN PRINTING; SHRINKAGE; SINTERING;

PIEZOELECTRIC DEVICES;

EID: 33744745624     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1632674     Document Type: Article

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