Characterization of amorphous carbon films grown by pulsed laser deposition

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3343, Issue , 1998, Pages 885-894

  Siegal, Michael P ^a   Martinez Miranda, Luz J ^b   Dinardo, N J ^c   Tallant, David R ^a   Barbour, John C ^a   Newcomer Provencio, Paula ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c DREXEL UNIVERSITY   (United States)

Author keywords

Amorphous carbon; Density; Electron emission; Pulsed laser deposition

Indexed keywords

AMORPHOUS CARBON; CARBON FILMS; DIAMOND FILMS; DIAMOND LIKE CARBON FILMS; ELECTRIC FIELDS; ELECTRON EMISSION; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC STRUCTURE; ELECTRONS; EMISSION SPECTROSCOPY; ENERGY DISSIPATION; FLAT PANEL DISPLAYS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LASER ABLATION; LASER APPLICATIONS; LASERS; MICROELECTRONICS; PROGRAMMABLE LOGIC CONTROLLERS; PULSED LASER DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING; SCANNING TUNNELING MICROSCOPY; SURFACE STRUCTURE; VACUUM TECHNOLOGY;

A-C FILMS; AMORPHOUS CARBON FILMS; AMORPHOUS CARBONS (A-C); APPLIED ELECTRIC FIELDS; BONDING CONFIGURATIONS; CARBON ATOMS; DENSITY; DIAMOND LIKES; ELECTRON EMISSION MECHANISMS; ELECTRON ENERGY LOSS; ELECTRON-EMISSION PROPERTIES; ENERGETIC PROCESS; HIGH-RESOLUTION TRANSMISSION ELECTRON MICROSCOPIES; LOCALIZED FIELDS; PULSED LASERS; ROOM TEMPERATURES; RUTHERFORD BACK-SCATTERING SPECTROMETRIES; SCANNING FORCE MICROSCOPIES; SCANNING TUNNELING MICROSCOPES; VACUUM MICROELECTRONICS; X-RAY REFLECTIVITIES;

AMORPHOUS FILMS;

EID: 33744686334     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321617     Document Type: Conference Paper

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