Determination of the sp3/sp2 ratio in tetrahedral amorphous carbon films by effective medium approximation

Journal of Applied Physics

Volumn 83, Issue 3, 1998, Pages 1281-1285

  Chen, Z Y ^a   Yu, Y H ^a   Zhao, J P ^a   Wang, X ^a   Liu, X H ^a   Shi, T S ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000081331     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366826     Document Type: Article

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