Design and fabrication of piezoelectric acoustic sensor

WSEAS Transactions on Electronics

Volumn 3, Issue 4, 2006, Pages 192-196

  Saleh, Sherif ^a   Elsimary, Hamed ^a   Zaki, Amal ^a   Ahmad, Shamim ^b  

^a ELECTRONICS RESEARCH INSTITUTE   (Egypt)

^b CENTRAL ELECTRONICS ENGINEERING RESEARCH INSTITUTE   (India)

Author keywords

Acoustic sensors; MEMS sensors; Piezoelectric sensors

Indexed keywords

ETCHING; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE; SPUTTER DEPOSITION; ZINC OXIDE;

EXCITATION ENERGY; PIEZOELECTRIC ACOUSTIC SENSOR; WET CHEMICAL ETCHING;

PIEZOELECTRIC DEVICES;

EID: 33744541672     PISSN: 11099445     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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