Activities of LIGA and nano LIGA technologies at BSRF

Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 865-869

  Yi, F ^a   Zhang, J ^a   Xie, C ^b   Wang, D ^b   Chen, D ^b  

^a INSTITUTE OF HIGH ENERGY PHYSICS   (China)

^b INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744535632     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/34/1/143     Document Type: Article

References (5)

1. Tang E, F Yi, SB Zhang and D Chen 1998 Microsystem Technologies 4 58
2. Tang E, Y Yan, S Xia, P Wang, F Yi, Y Huang, J Liu and M Cui 1998 J. Synchrotron Rad. 5 530
3. Yi F, T Ye, L Peng, D Chen, J Zhang and Y Han 2004 Chinese Phys. 13 731
4. Yi F, L Peng, J Zhang and Y Han 2001 Microsystem technologies 7 103
5. Yi F, P Miao, L Peng, J Zhang and Y Han 2004 Chinese journal semiconductors 25 26