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Microelectronics Journal

Volumn 28, Issue 4 SPEC. ISS., 1997, Pages 433-448

Polycrystalline silicon layers for micromechanical applications: Stress profile analysis

(3) Morante, J R a Samitier, J a Benrakkad, M S a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000808091 PISSN: 00262692 EISSN: None Source Type: Journal
DOI: 10.1016/s0026-2692(96)00075-4 Document Type: Article

Times cited : (9)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.