A novel method to fabricate complex three-dimensional microstructures

Microsystem Technologies

Volumn 12, Issue 8, 2006, Pages 786-789

  Liu, Jing Quan ^a   Sun, Hong Wen ^a   Li, Ling Han ^a   Chen, Di ^a  

^a Shanghai Jiao Tong University   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; HOT PRESSING; LITHOGRAPHY; PHOTONS; SUBSTRATES; ULTRAVIOLET RADIATION;

EXPOSURE DOSE; POST-BAKE PROCESS; SILICON SUBSTRATE; UV-LIGA TECHNOLOGY;

MICROSTRUCTURE;

EID: 33744511556     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0099-x     Document Type: Article

References (9)

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