Fabrication of X-ray masks and applications for optical switch molding

Sensors and Actuators, A: Physical

Volumn 108, Issue 1-3, 2003, Pages 224-229

  Shan, X C ^a,b   Maeda, R ^b   Ikehara, T ^b   Mekaru, H ^c   Hattori, T ^c  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

Au mask; ECR; Hot embossing; LIGA process; Mold; PMMA; X ray

Indexed keywords

COATINGS; ELECTRON CYCLOTRON RESONANCE; GOLD; INJECTION MOLDING; METALLIC FILMS; MIRRORS; POSITIVE IONS; REACTIVE ION ETCHING; SILICON; X RAY LITHOGRAPHY; X RAYS;

EMBOSSING PROCESS;

OPTICAL SWITCHES;

EID: 0344083393     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.06.001     Document Type: Conference Paper

References (9)

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