CoSi2 nanostructures by writing FIB ion beam synthesis

Materials Science and Engineering C

Volumn 26, Issue 5-7, 2006, Pages 818-821

  Akhmadaliev, Ch ^a   Bischoff, L ^a   Schmidt, B ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Cobalt disilicide; Focused ion beam; Ion beam synthesis; Nanowire

Indexed keywords

ANNEALING; COBALT ALLOYS; ION BEAMS; IRRADIATION; PRECIPITATION (CHEMICAL); SHRINKAGE;

COBALT DISILICIDE; FOCUSED ION BEAM; ION BEAM SYNTHESIS; NANOWIRES;

NANOSTRUCTURED MATERIALS;

EID: 33646853299     PISSN: 09284931     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msec.2005.09.026     Document Type: Article

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