Influence of oxygen pressure on the structural and dielectric properties of laser-ablated Ba0.5Sr0.5TiO3 thin films epitaxially grown on (001) MgO for microwave phase shifters

Journal of Physics D: Applied Physics

Volumn 39, Issue 10, 2006, Pages 2282-2288

  Zhu, X H ^a   Meng, Q D ^a   Yong, L P ^a   He, Y S ^a   Cheng, B L ^a   Zheng, D N ^a  

^a INSTITUTE OF PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAPACITORS; CORRELATION THEORY; DIELECTRIC PROPERTIES; LASER ABLATION; OXYGEN; PRESSURE EFFECTS;

BST FILMS; FIELD DIRECTION; MICROWAVE PHASE SHIFTERS; OXYGEN DEPOSITION DEPOSITION;

THIN FILMS;

EID: 33646742965     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/10/043     Document Type: Article

References (28)

1. Carlson C M, Rivkin T V, Parilla P A, Perkins J D, Ginley D S, Kozyrev A B, Oshadchy V N and Pavlov A S 2000 Appl. Phys. Lett. 76 1920
2. Chen C L, Shen J, Chen S Y, Luo G P, Chu C W, Miranda F A, Van Keuls F W, Jiang J C, Meletis E I and Chang H Y 2001 Appl. Phys. Lett. 78 652
3. Acikel B, Taylor T R, Hansen P J, Speck J S and York R A 2002 IEEE Microw. Wireless Compon. Lett. 12 237
4. Cole M W, Nothwang W D, Hubbard C, Ngo E and Ervin M 2003 J. Appl. Phys. 93 9218
5. Gim Y, Hudson T, Fan Y, Kwon C, Findikoglu A T, Gibbons B J, Park B H and Jia Q X 2000 Appl. Phys. Lett. 77 1200
6. Zhu X H, Zhu J M, Zhou S H, Liu Z G, Ming N B, Lu S G, Chan H L W and Choy C L 2003 J. Electron. Mater. 32 1125
7. Nakamura T, Yamanaka Y, Morimoto A and Shimizu T 1995 Japan. J. Appl. Phys. 34 5150
8. Kim W J, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B and Horwitz J S 2000 Appl. Phys. Lett. 76 1185
9. Kim W J, Wu H D, Chang W, Qadri S B, Pond J M, Kirchoefer S W, Chrisey D B and Horwitz J S 2000 J. Appl. Phys. 88 5448
10. Carlson C M, Parilla P A, Rivkin T V, Perkins J D and Ginley D S 2000 Appl. Phys. Lett. 77 3278
11. Wang Y G, Reeves M E, Kim W J, Horwitz J S and Rachford F J 2001 Appl. Phys. Lett. 78 3872
12. Navi N, Kim H, Horwitz J S, Wu H D and Qadri S B 2003 Appl. Phys. A 76 841
13. Ding Y P, Wu J S, Meng Z Y, Chan H L and Choy Z L 2002 Mater. Chem. Phys. 75 220
14. Goux L, Gervais M, Catherinot A, Champeaux C and Sabary F 2002 J. Non-Cryst. Solids 303 194
15. Delage T, Champeaux C, Catherinot A, Seaux J F, Madrangeas V and Cros D 2004 Thin Solid Films 453-454 279
16. Gevorgian S, Carlsson E, Rudner S, Wernlund L D, Wang X and Helmersson U 1996 IEE Proc. Part H: Microwaves, Antennas Propag. 143 397
17. Gevorgian S S, Martinsson T, Linner P L J and Kollberg E L 1996 IEEE Trans. Microw. Theory Tech. 44 896
18. Liu Y, Nagra A S, Erker E G, Periaswamy P, Taylor T R, Speck J and York R A 2000 IEEE Microw. Guided Wave Lett. 10 448
19. Pontes F M, Leite E R, Longo E, Varela J A, Araujo E B and Eiras J A 2000 Appl. Phys. Lett. 76 2433
20. Hubert C, Levy J, Cukauskas E J and Kirchoefer S W 2000 Phys. Rev. Lett. 85 1998
21. Xia Y D, Cheng J B, Pan B, Wu D, Meng X K and Liu Z G 2005 Appl. Phys. Lett. 87 052902
22. Park B H, Peterson E J, Jia Q X, Lee J, Zeng X, Si W and Xi X X 2001 Appl. Phys. Lett. 78 533
23. Hyun S, Lee J H, Kim S S, Char K, Park S J, Sok J and Lee E H 2000 Appl. Phys. Lett. 77 3084
24. Hyun S and Char K 2001 Appl. Phys. Lett. 79 254
25. Wang D Y, Wang Y, Zhou X Y, Chan H L W and Choy C L 2005 Appl. Phys. Lett. 86 212904
26. Bellotti J A, Chang W, Qadri S B, Kirchoefer S W and Pond J M 2006 Appl. Phys. Lett. 88 012902
27. Choi K J et al 2004 Science 306 1005
28. Haeni J H et al 2004 Nature 430 758