Microfabrication in free-standing gallium nitride using UV laser micromachining

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4897-4901

  Gu, E ^a   Howard, H ^b   Conneely, A ^b   O'Connor, G M ^b   Illy, E K ^c   Knowles, M R H ^c   Edwards, P R ^a   Martin, R W ^a   Watson, I M ^a   Dawson, M D ^a  

^a UNIVERSITY OF STRATHCLYDE   (United Kingdom)

^b NATIONAL UNIVERSITY OF IRELAND   (Ireland)

^c OXFORD LASERS LTD   (United Kingdom)

Author keywords

Gallium nitride; Micromachining; Pulsed UV lasers

Indexed keywords

ETCHING; LIGHT EMITTING DIODES; MICROSTRUCTURE; SEMICONDUCTOR MATERIALS; SUBSTRATES; ULTRAVIOLET RADIATION;

LOW ETCH RATES; MACHINING PARAMETERS; PULSED UV LASERS;

GALLIUM NITRIDE;

EID: 33646591263     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.117     Document Type: Article

References (6)

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