LBIC imaging of semiconductor arrays: The cross-sectional model

Mathematical and Computer Modelling

Volumn 40, Issue 1-2, 2004, Pages 127-136

  Fang, Weifu ^a   Ito, K ^b   Redfern, D A ^c  

^a WEST VIRGINIA UNIVERSITY   (United States)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

^c Australia ^*  (Australia)

Author keywords

Homogenization; Inverse problem; LBIC; Parameter identification; Semiconductor arrays

Indexed keywords

HOMOGENIZATION METHODS; LASER BEAM INDUCED CURRENT (LBIC); SEMICONDUCTOR ARRAYS;

APPROXIMATION THEORY; ARRAYS; COMPUTATIONAL METHODS; COMPUTER SIMULATION; ELECTRIC CURRENTS; LASER BEAMS; MATHEMATICAL MODELS; NONDESTRUCTIVE EXAMINATION; SEMICONDUCTOR JUNCTIONS;

IMAGING TECHNIQUES;

EID: 9944230603     PISSN: 08957177     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mcm.2003.10.045     Document Type: Article

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