메뉴 건너뛰기




Volumn 42, Issue 9, 2006, Pages 525-526

Contactless system for dynamic characterisation of microresonators

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; ELECTRIC EXCITATION; ELECTRIC FREQUENCY MEASUREMENT; FREQUENCY RESPONSE; PIEZOELECTRIC DEVICES; READOUT SYSTEMS; VIBRATIONS (MECHANICAL);

EID: 33646428697     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20060728     Document Type: Article
Times cited : (3)

References (5)
  • 1
    • 28844431584 scopus 로고    scopus 로고
    • Experimental modal analysis for microsystems
    • Ozdoganlar, O.B., Hansche, B.D., and Carne, T.G.: ' Experimental modal analysis for microsystems ', Exp. Mech., 2005, 45, (6), p. 498-506
    • (2005) Exp. Mech. , vol.45 , Issue.6 , pp. 498-506
    • Ozdoganlar, O.B.1    Hansche, B.D.2    Carne, T.G.3
  • 2
    • 0038779664 scopus 로고    scopus 로고
    • Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: Status and trends
    • Bosseboeuf, A., and Petitgrand, S.B.: ' Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends ', J. Micromech. Microeng., 2003, 13, p. 23-33
    • (2003) J. Micromech. Microeng. , vol.13 , pp. 23-33
    • Bosseboeuf, A.1    Petitgrand, S.B.2
  • 3
    • 0035758325 scopus 로고    scopus 로고
    • Optical measurement methods to study dynamic behavior in MEMS
    • Rembe, C., Kant, R., and Muller, R.S.: ' Optical measurement methods to study dynamic behavior in MEMS ', Proc. SPIE, 2001, 4400, p. 127-131
    • (2001) Proc. SPIE , vol.4400 , pp. 127-131
    • Rembe, C.1    Kant, R.2    Muller, R.S.3
  • 4
    • 27944440671 scopus 로고    scopus 로고
    • Characteization system for resonant micro- and nanocantilevers
    • Sandberg, R., Boisen, A., and Svendsen, W.: ' Characteization system for resonant micro- and nanocantilevers ', Rev. Sci. Instrum., 2005, 76, p. 125101-125107
    • (2005) Rev. Sci. Instrum. , vol.76 , pp. 125101-125107
    • Sandberg, R.1    Boisen, A.2    Svendsen, W.3
  • 5
    • 0020782824 scopus 로고
    • Digital phase detection based on in-phase and quadrature sampling
    • Saniie, J., and Luukkala, M.: ' Digital phase detection based on in-phase and quadrature sampling ', J. Phys. E: Sci. Instrum., 1983, 16, p. 606-607
    • (1983) J. Phys. E: Sci. Instrum. , vol.16 , pp. 606-607
    • Saniie, J.1    Luukkala, M.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.