Step-by-step laser crystallization of amorphous Si:H/SiNx:H multilayer for active layer in microcavities

Chinese Physics Letters

Volumn 23, Issue 5, 2006, Pages 1302-1305

  Qian, Bo ^a   Chen, San ^a   Cen, Zhan Hong ^a   Chen, Kun Ji ^a   Liu, Yan Song ^a   Xu, Jun ^a   Ma, Zhong Yuan ^a   Li, Wei ^a   Huang, Xin Fan ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; MICROCAVITIES; MULTILAYER FILMS; NANOCRYSTALS; OPTICAL MULTILAYERS; SEMICONDUCTOR QUANTUM DOTS;

A-SI:H; ACTIVE LAYER; AMORPHOUS SI; CRYSTALLIZATION PROPERTIES; LASER CRYSTALLIZATION; LASER-ANNEALING; MULTILAYERS FILMS; NANOCRYSTALLINE SI; PHOTOLUMINESCENCE PROPERTIES; RAMAN MEASUREMENTS;

MULTILAYERS;

EID: 33646412050     PISSN: 0256307X     EISSN: 17413540     Source Type: Journal    
DOI: 10.1088/0256-307X/23/5/066     Document Type: Article

References (13)

1. Canham L T 1990 Appl. Phys. Lett. 57 1046
2. Pavesi L, Dal Negro L, Mazzoleni C, Franzo G and Priolo F 2000 Nature 408 440-444
3. Li D S, Yang D R, Leoni E, Binetti S and Pizzini S 2004 Chin. Phys. Lett. 21 2242
4. Chen S, Qian B, Wei J W, Chen K J, Xu J, Li W and Huang X F 2005 Chin. Phys. Lett. 22 230
5. Wang L, Wang X W, Huang X F and Li Z F 2001 J. Phys.: Condens. Matter 13 9857
6. Qiao F, Huang X F, Zhu D, Ma Z Y, Zou H C, Sui Y P, Li W, Zhou X H and Chen K J 2004 Acta Phys. Sin. 53 4303 (in Chinese)
7. Mei P, Boyce J B, Hack M, Lujan R A, Johnson R I, Anderson G B, Fork D K and Ready S E 1994 Appl. Phys. Lett. 64 1132
8. Lengsfeld P, Nickel N H and Fuhs W 2000 Appl. Phys. Lett. 76 1680
9. Zhang L, Chen K, Wang L, Li W, Xu J, Huang X F and Chen K J 2002 J. Phys.: Condens. Matter 14 10083
10. Zhang L, Chen K, Huang X, Wang L, Xu J and Li W 2003 Appl. Phys. A 77 485
11. Campbell I H and Fauchet P M 1986 Solid State Commun. 58 739
12. Yue G Z, Lorentzen J D, Lin J, Han D X and Wang Q 1999 Appl. Phys. Lett. 75 492
13. Kim T Y, Park N M, Kim K H, Sung G Y, Ok Y W, Seong T Y and Choi C J 2004 Appl. Phys. Lett. 85 5355