Control of size and shape of nc-Si in a-SiNx/a-Si:H multilayers by laser induced constrained crystallization

Applied Physics A: Materials Science and Processing

Volumn 77, Issue 3-4, 2003, Pages 485-489

  Zhang, L ^a   Chen, K ^a   Huang, X ^a   Wang, L ^a   Xu, J ^a   Li, W ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; CRYSTALLIZATION; ELECTRONIC DENSITY OF STATES; HYDROGEN; LASER APPLICATIONS; MATHEMATICAL MODELS; MULTILAYERS; PARTICLE SIZE ANALYSIS; SILICON NITRIDE; THICKNESS MEASUREMENT; TRANSMISSION ELECTRON MICROSCOPY;

CONTROL OF SIZE AND SHAPE; LASER ENERGY DENSITY; SUBLAYER THICKNESS; TRANSITIONAL PROCESS;

SILICON;

EID: 0042660846     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-002-1473-x     Document Type: Article

References (24)

1. Z.H. Lu, D.J. Lockwood, J.M. Baribeau: Nature 378, 258 (1995)
2. W.L. Wilson, P.F. Szajowski, L.E. Brus: Science 262, 1242 (1993)
3. S. Furukawa, T. Miyasato: Phys. Rev. B 38, 5726 (1988)
4. H. Takagi, H. Ogawa, Y. Yamazabi: Appl. Phys. Lett. 56, 2379 (1992)
5. L. Pavesi, L.D. Negro, C. Mazzoleni: Nature 408, 440 (2000)
6. P. Photopoulos, A.G. Nassiopoulou, D.N. Kouvatsos: Mater. Sci. Eng. B 69-70, 345, (2000)
7. K.J. Chen, X.F. Huang, J. Xu: J. Non-Cryst. Solids 164-166, 977 (1993)
8. G.F. Grom, D.J. Lockwood, J.P. McCafftey, H.J. Labbe: Nature 407, 358 (2000)
9. J. Robertson: J. Non-Cryst. Solids 266-269, 79 (2000)
10. M. Zacharias, J. Blasing, P. Veit: Appl. Phys. Lett. 74, 2614 (1999)
11. M. Zacharias, J. Blasing, K. Hirschman: J. Non-Cryst. Solids 266-269, 640 (2000)
12. T. Tagami, Y. Wakayama, S. Tanaka: Jpn. J. Appl. Phys. 36, L734 (1997)
13. K.J. Chen, X.F. Huang, J. Xu, D. Feng: J. Non-Cryst. Solids 198-200, 833 (1996)
14. K.J. Chen, X.F. Huang, J. Xu, D. Feng: Appl. Phys. Lett. 61, 2069 (1992)
15. X.F. Huang, Z.F. Li, Z.G. Liu, K.J. Chen: J. Non-Cryst. Solids 198-200, 821 (1996)
16. M.X. Wang, X.F. Huang, K.J. Chen: Appl. Phys. Lett. 72, 722 (1998)
17. P.D. Persans, A. Ruppert, B. Abeles: J. Non-Cryst. Solids 102, 130 (1988)
18. G. Ledoux, O. Guillois, D. Porterat: Phys. Rev. B 62, 15942 (2000)
19. C. Spinella, S. Lombardo, F. Priolo: J. Appl. Phys. 84, 5383 (1998)
20. H. Kumomi, T. Yonehara: J. Appl. Phys. 75, 2884 (1994)
21. S. Veprek, Z. Iqbal, F.A. Sarott: Philos. Mag. B 45, 137 (1982)
22. I. Honma, H. Komiyama, K. Tanaka: J. Appl. Phys. 66, 1170 (1989)
23. X. Gao, X.F. Huang, K.J. Chen: Chin. J. Lasers 24, 803 (1997)
24. M.L. Burgener, R.E. Reedy: J. Appl. Phys. 53, 4357 (1982)