Pulsed-spray radiofrequency plasma enhanced chemical vapor deposition of CuInS2 thin films

Plasma Chemistry and Plasma Processing

Volumn 26, Issue 2, 2006, Pages 137-148

  Rodrigucz, Rene G ^a   Pulsipher, Daniel J V ^a   Lau, Lisa D ^a   Shurdha, Endrit ^a   Pak, Joshua J ^a   Jin, Michael H ^b   Banger, Kublinder K ^b   Hepp, Aloysius F ^c  

^a IDAHO STATE UNIVERSITY   (United States)

^b OHIO AEROSPACE INSTITUTE   (United States)

^c NASA GLENN RESEARCH CENTER   (United States)

Author keywords

CuInS2; Liquid spray; PECVD; Single source precursor

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; FILM GROWTH; SUBSTRATES; THIN FILMS;

ATOMIC COMPOSITION; CUINS2; LIQUID-SPRAY; SINGLE-SOURCE PRECURSOR;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

EID: 33646411519     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-006-9018-2     Document Type: Article

References (17)

1. Rockett A (1998-2001) NREL/SR-520-34335 Subcontractor Report, National Renewable Energy Laboratory, Golden, CO
2. Kijatkina O, Krunks M, Mere A, Marhrov B, Dloczik L (2003) Thin Solid Films 105:431
3. Siebentritt S (2002) Thin Solid Films 1:403
4. Walter T, Braunger D, Hariskos D, Koble Ch, Schock HW (1995) Proceedings of the 13th European Potov. Energy Conf., Nice, p 597
5. Solar Energy Research Institute (1984) Basic photovoltaic principles and methods, Van Nostrand Reinhold Co. Inc., New York, NY
6. Shao L, Chang K, Hwang H (2003) Mater Sci. Semiconductor Process 6:397
7. Krunks M, Kijatkina O, Rebane H, Oja I, Mikli V, Mere A (2002) Thin Solid Films 71:403
8. Kondo K, Nakamura S, Sano H, Hirasawa H, Sato K (1997) Jpn J Appl Phys 36:6668
9. Chicibu S, Shirakata S, Isomura S, Naknishi H (1997) Jpn J Appl Phys 36:1703
10. Banger KK, Harris JD, Cowen JE, Hepp AF (2002) Thin Solid Films 403-404:390
11. Jones PA, Jackson AD, Pilkington RD, Lickiss PD (1992) Thin Solid Films 229:5
12. Kelly C, Jin MH, Banger KK, McNatt J, Dickman JE, Hepp AF (2005) Mat Sci Engr B 116:403
13. Banger KK, Jin MH, Harris JD, Fanwick PE, Ilepp AF (2003) Inorg Chem 42:7713
14. Kondo K, Nakamura S, Sate K (1998) Jpn J Appl Phys 37:5728
15. Rudiger E, Luck I, Scheer R (2003) Appl Phys Lett 82:4370
16. Alvarez-Garcia J, Perez-Rodriguez A, Bacones B, Romano-Rodriguez A, Morante J, Janotti A, Wei S, Scheer R (2002) Appl Phys Lett 80:562
17. Banger KK, Cowen JE, Hepp AF (2001) Chem Mater 13:3827