The one-step vacuum growth of high-quality CuInS2 thin film suitable for photovoltaic applications

Materials Science in Semiconductor Processing

Volumn 6, Issue 5-6, 2003, Pages 397-400

  Shao, Lexi ^a,b   Chang, Kun Hui ^a   Hwang, Huey Liang ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b LINGNAN NORMAL UNIVERSITY   (China)

Author keywords

High quality CuInS2 thin films; RF magnetron reactive sputtering

Indexed keywords

CARRIER CONCENTRATION; COPPER COMPOUNDS; FILM GROWTH; MAGNETRON SPUTTERING; OPTIMIZATION; PHOTOVOLTAIC EFFECTS; SILICON WAFERS; SOLAR CELLS; VACUUM APPLICATIONS;

HIGH-QUALITY CUINS2 THIN FILMS; RF MAGNETRON REACTIVE SPUTTERING;

THIN FILMS;

EID: 1642618639     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2003.05.016     Document Type: Conference Paper

References (10)

1. Kazmerski L.L., Ganbon G. J Appl Phys. 48:1977;3178.
2. Scheer R., Walter T., Schock H., Fearheiley M., Lewenrenz H.J. Appl Phys Lett. 63:1993;3294.
3. Ogawa Y., Jager-Waldau A., Hashimoto Y., Ito K. Jpn J Appl Phys. 33:1994;L1775.
4. Hwang H.L., Sun C.Y., Fang C.S., Chang S.D., Cheng C.H., Yang M.H., Lin H.H., Tuwan-mu T. J Cryst Growth. 55:1981;116.
5. Hwang H.L., Cheng C.H., Liu L.M., Sun C.Y. Thin Solid Films. 67:1980;83.
6. Hodes G., Engelhard T., Cahen D. Thin Solid Films. 128:1985;93.
7. Onagawa H., Miyashita K. Jpn J Appl Phys. 23:1984;965.
8. Siemer K., Klaer J., Luck I., Bruns J., Klenk R., Braunig D. Sol Eng Mat Sol Cells. 67:2001;159.
9. He Y.B., Polity A., Alves H.R., Österreicher I., Kriegseis W., Pfisterer D., Meyer B.K., Hardt M. Thin Solid Films. 403/404:2002;62.
10. Ellmer K., Hinze J., Kiaer J. Thin Solid Films. 413:2002;92-97.