A novel thermal-bubble-based micromachined accelerometer

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 519-522

  Liao, Ke Min ^a   Chen, Rongshun ^a   Chou, Bruce C S ^b  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b LighTuning Technology Inc   (Taiwan)

Author keywords

Heat transfer; Micromachined accelerometer; Thermal bubble

Indexed keywords

ACCELEROMETERS; ACTUATORS; HEAT FLUX; HEAT TRANSFER; HEATING EQUIPMENT; MICROELECTROMECHANICAL DEVICES; SENSORS; VAPORIZATION;

FLUX HEATERS; MICRO-CHAMBER; MICROMAHINED ACCELEROMETER; THERMAL BUBBLE;

SOLID STATE DEVICES;

EID: 27544474213     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. E. Belloy, A. Sayah, and M. A. M. Gijs, "Micromachining of glass inertial sensors," J. Microelectromech. Syst., 11, pp. 85-90, 2002.
2. L. C. Spangler and C. J. Kemp, "ISAAC: integrate silicon automotive accelerometer," Sens. Actuators A, 54, pp. 523-529, 1996.
3. T. Mineta, S. Kobayashi, Y. Watanabe, S. Kanauchi, I. Nakagawa, E. Wuganuma, and M. Esashi, "Three-axis capacitive accelerometer with uniform axial sensitivities," J. Micromech. Microeng., 6, pp. 431-435, 1996.
4. R. Dao, D. E. Morgan, H. H. Kries, and D. M. Bachelder, "Convective Accelerometer and Inclinometer," United States Patent #5,581,034, REMEC, Inc., 1996.
5. A. M. Leung, J. Jones, E. Czyzewska, J. Chen, and M. Pascal, "Micromachined accelerometer with no proof mass," Technical Digest of Int. Electron Device Meet., pp. 899-902, 1997.
6. V. Milanovic, E. Bowen, N. Tea, J. S. Suchle, B. Payne, M. E. Zaghloul, and M. Gaitan, "Convection-Based Accelerometer and Tilt Sensor Implemented in Standard CMOS," MEMS Symposia on International Mechanical Engineering and Exposition, pp. 627-630, 1998.
7. X. B. Luo, Z. X. Li, Z. Y. Guo, and Y. J. Yang, "Thermal Optimization on Micromachined Convective Accelerometer," Heat and Mass Transfer, 38, pp. 705-712, 2002.
8. S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, and W. Lang, "Micromachined Inclinometer with High Sensitivity and Very Good Stability," Sens. Actuators A, 97-98, pp. 125-130, 2002.