Metallic nanogaps with access windows for liquid based systems

Microelectronics Journal

Volumn 37, Issue 7, 2006, Pages 591-594

  Kronholz, Stephan ^a   Karthäuser, Silvia ^a   Hart, A van der ^a   Wandlowski, T ^a   Waser, Rainer ^a,b  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Access window; Electron beam; Liquid based system; Lithographie; Nanogap; Protection layer

Indexed keywords

ADHESION; ELECTRON BEAMS; GOLD; MICROPROCESSOR CHIPS; NANOTECHNOLOGY; OPTICAL BEAM SPLITTERS; SILICON; SURFACE ROUGHNESS;

ACCESS WINDOW; LIQUID BASED SYSTEM; LITHOGRAPHIC STRUCTURES; NANOGAPS; PROTECTION LAYER;

NANOSTRUCTURED MATERIALS;

EID: 33646229091     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mejo.2005.09.031     Document Type: Article

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