Low-power MOEMS components for active optical systems

Journal of Microlithography, Microfabrication and Microsystems

Volumn 4, Issue 4, 2005, Pages

  Castracane, James ^a   Yan, Dong ^a   Madison, Seth ^a   Panaman, Ganesh ^a   Xu, Bai ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

Diffraction gratings; MOEMS; Nanotechnology; Optical interconnect

Indexed keywords

MOEMS; NANOSCALE SCIENCE AND ENGINEERING (CNSE); SURFACE TOPOLOGY;

DIFFRACTION GRATINGS; ELECTRIC POTENTIAL; ELECTRIC POWER UTILIZATION; ELECTROSTATICS; FABRICATION; NANOTECHNOLOGY; OPTICAL INTERCONNECTS; OPTICAL SYSTEMS; POLYMERS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646199247     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.2121087     Document Type: Article

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