MEMS-based microgratings: Preliminary results of novel configurations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3276, Issue , 1998, Pages 196-206

  Castracane, James ^a   Gutin, Mikhail ^a  

^a InterScience Inc   (United States)

Author keywords

Diffraction; Gratings; MEMS; Spectroscopy

Indexed keywords

DIFFRACTION; DIFFRACTION GRATINGS; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SPECTROSCOPIC ANALYSIS;

MICROGRATINGS;

MICROOPTICS;

EID: 0032225648     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.302396     Document Type: Conference Paper

References (9)

1. Micro-opto-electro-mechanical devices and on-chip optical processing
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3. Current status of the DMD for projection television applications
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5. Surface micromachined free-space fiber optic switches
6. Deformable grating light valves for high resolution displays
7. Development and characterization of micro-mechanical gratings for optical modulation
8. Micro-electro-mechanical variable blaze gratings