The effect of crystal structure and morphology on the optical properties of chromium nitride thin films

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 637-641

  Logothetidis, S ^a   Patsalas, P ^a   Sarakinos, K ^a   Charitidis, C ^a   Metaxa, C ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

Grain growth; Mononitrides; Spectroscopic ellipsometry; X ray diffraction

Indexed keywords

ADHESION; CARRIER CONCENTRATION; COATINGS; CRYSTAL STRUCTURE; ELLIPSOMETRY; MAGNETRON SPUTTERING; MORPHOLOGY; SINGLE CRYSTALS; SURFACE CHEMISTRY; THICK FILMS; X RAY DIFFRACTION ANALYSIS;

DRUDE-LORENTZ MODEL; VALENCE ELECTRONS;

CHROMIUM COMPOUNDS;

COATING;

EID: 1842731929     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.108     Document Type: Article

References (14)

1. Stampfl C. Mannstadt W. Asahi R. Freeman A.J. Phys. Rev. B 63 2001 155106
2. Hultman L. Vacuum 57 2001 1
3. Glocker D.A Shat S.I Handbook of Thin Film Process Technology 1995 Institute of Physics Wilmington, Delaware
4. Bertrand G. Savall C. Meunier C. Surf. Coat. Technol. 96 1997 323
5. Navinsek B. Panjan P. Milosev I. Surf. Coat. Technol. 97 1997 182
6. Patsalas P. Logothetidis S. J. Appl. Phys. 93 2003 989
7. Patsalas P. Logothetidis S. J. Appl. Phys. 90 2001 4725
8. Wooten F. Optical Properties of Solids 1972 Academic Press New York
9. Gall D. Shin C.-S. Haasch R.T. Petrov I. Greene J.E. J. Appl. Phys. 91 2002 5882
10. Häglund J. Grimvall G. Jarlborg T. Fernández Guillermet A. Phys. Rev. B 43 1991 14400
11. Papaconstantopoulos D.A. Pickett W.E. Klein B.M. Boyer L.L. Phys. Rev. B 31 1985 752
12. JCPDS, Powder Diffraction File 34-0567, 35-0803, 06-0694
13. Parratt L.G. Heampsted C.F. Phys. Rev. 94 1954 1593
14. Aouadi S.M. Mihut D.M. Kuruppu M.L. Kirkpatrick S.R. Rohde S.L. J. Vac. Sci. Technol. A 9 2001 2800