High-precision micromilling for low-cost fabrication of metal mold masters

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6112, Issue , 2006, Pages

  Hupert, Mateusz L ^a   Jason Guy, W ^a   Llopis, Shawn D ^a   Situma, Catherine ^a   Rani, Sudheer ^a   Nikitopoulos, Dimitris E ^a   Soper, Steven A ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

High precision micromilling; Hot embossing; Microfluidic device; PDMS; PMMA

Indexed keywords

COMPUTER SIMULATION; COST EFFECTIVENESS; ELECTROPHORESIS; METAL MOLDING; MICROPROCESSOR CHIPS; POLYMETHYL METHACRYLATES;

HIGH-PRECISION MICROMILLING; HOT-EMBOSSING; MICROFLUIDIC DEVICE; PDMS;

MILLING (MACHINING);

EID: 33646071216     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.647135     Document Type: Conference Paper

References (33)

1. Becker, H.; Gartner, C. Electrophoresis 2000, 21, 12-26.
2. Boone, T. D.; Fan, Z. H.; Hooper, H. H.; Ricco, A. J.; Tan, H.; Williams, S. J. Analytical Chemistry 2002, 74, 78A-86A.
3. Soper, S. A.; Ford, S. M.; Qi, S.; McCarley, R. L.; Kelly, K.; Murphy, M. C. Analytical Chemistry 2000, 72, 643A-651 A.
4. Ehrfeld, W.; Lehr, H.; Michel, F.; Wolf, A.; Gruber, H.-P.; Bertholds, A. Proceedings of SPIE-The International Society for Optical Engineering 1996, 2879, 332-337.
5. Guber, A. E.; Heckele, M.; Herrmann, D.; Muslija, A.; Saile, V.; Eichhorn, L.; Gietzelt, T.; Hoffmann, W.; Hauser, P. C.; Tanyanyiwa, J.; Gerlach, A.; Gottschlich, N.; Knebel, G. Chemical Engineering Journal (Amsterdam, Netherlands) 2004, 101, 447-453.
6. Friedrich, C. R.; Coane, P. J.; Goettert, J.; Gopinathin, N. Precision Engineering 1998, 22, 164-173.
7. Schaller, T.; Bohn, L.; Mayer, J.; Schubert, K. Precision Engineering 1999, 23, 229-235.
8. Madou, M.; Lee, L. J.; Koelling, K. W.; Daunert, S.; Lai, S.; Koh, C. G.; Juang, Y.; Yu, L.; Lu, Y. ANTEC-SPE 59th 2001, 2534-2538.
9. Gerlach, A.; Knebel, G.; Guber, A. E.; Hcckelc, M.; Herrmann, D.; Muslija, A.; Schaller, T. Microsystem Technologies 2002, 7, 265-268.
10. Zhao, D. S.; Roy, B.; McCormick, M. T.; Kuhr, W. G.; Brazill, S. A. Lab on a Chip 2003, 3, 93-99.
11. Pu, Q.-S.; Luttge, R.; Gardeniers, H. J. G. E.; Van den Berg, A. Electrophoresis 2003, 24, 162-171.
12. Slater, G. W.; Mayer, P. Electrophoresis 1995, 16, 771-779.
13. Zhang, C.-X.; Manz, A. Analytical Chemistry 2001, 73, 2656-2662.
14. Ennakov, S. V.; Jacobson, S. C.; Ramsey, J. M. Analytical Chemistry 2000, 72, 3512-3517.
15. Huang, X.; Gordon, M. J.; Zare, R. N. Analytical Chemistiy 1988, 60, 1837-1838.
16. Situma, C.; Wang, Y.; Hupert, M.; Barany, F.; McCarlcy, R. L.; Soper, S. A. Analytical Biochemistiy 2005, 340, 123-135.
17. Rabck, J. F. Polymer Photodegradation: Mechanisms and Experimental Methods; Chapman & Hall: London, 1994.
18. Effrnhauser, C. S.; Manz, A.; Widmer, H. M. Analytical Chemistry 1993, 65, 2637-2642.
19. Effenhauser, C. S.; Paulus, A.; Manz, A.; Widmer, H. M. Analytical Chemistry 1994, 66, 2949-2953.
20. Harrison, D. J.; Fluri, K.; Seiler, K.; Fan, Z.; Effenhauser, C. S.; Manz, A. Science (Washington. DC. United States) 1993, 261, 895-897.
21. Jacobson, S. C.; Hergenroder, R.; Koutny, L. B.; Warmack, R. J.; Ramsey, J. M. Analytical Chemistry 1994, 66, 1107-1113.
22. Foley, J. P.; Dorsey, J. G. Analytical Chemistry 1983, 55, 730-737.
23. Chen, Z.; Gao, Y.; Lin, J.; Su, R.; Xie, Y. Journal of Chromatography, A 2004, 1038, 239-245.
24. Takacs, M.; Vero, B.; Meszaros, I. Journal of Materials Processing Technology,' 2003, 138, 152-155.
25. Chou, S. Y.; Krauss, P. R.; Renstrom, P. J. Journal of Vacuum Science & Technology, B: Microelectronics and Nanometer Structures 1996, 14, 4129-4133.
26. Bianchi, F.; Chevolot, Y.; Mathieu, H. J.; Girault, H. H. Analytical Chemistry 2001, 73, 3845-3853.
27. Blom, M. T.; Hasselbrink, E. F.; Wensink, H.; Van Den Berg, A. Micro Total Analysis Systems 2001, Proceedings mTAS 2001 Symposium, 5th, Monterey, CA, United States, Oct. 21-25, 2001 2001, 615-616.
28. Qi, S.; Liu, X.; Ford, S.; Barrows, J.; Thomas, G.; Kelly, K.; McCandlcss, A.; Lian, K.; Goettert, J.; Sopcr, S. A. Lab on a Chip 2002, 2, 88-95.
29. Thomas, G.; Sinville, R.; Sutton, S.; Farquar, H.; Hammer, R. P.; Soper, S. A.; Cheng, Y.-W.; Barany, F. Electrophoresis 2004, 25, 1668-1677.
30. Lee, G. B.; Chen, S. H.; Huang, G. R.; Sung, W. C.; Lin, Y. H. Sensors and Actuators. B: Chemical 2001, B75, 142-148.
31. Duffy, D. C.; McDonald, J. C.; Schueller, O. J. A.; Whitesides, G. M. Analytical Chemistry 1998, 70, 4974-4984.
32. Vilkner, T.; Janasck, D.; Manz, A. Analytical Chemistry 2004, 76, 3373-3386.
33. Delamarche, E.; Bernard, A.; Schmid, H.; Michael, B.; Biebuyck, H. Science (Washington. DC, United States) 1997, 779-781.