Arbitrarily profiled 3D polymer MEMS through Si micro-moulding and bulk micromachining

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1257-1260

  Larsson, Michael P ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

Deep reactive ion etching; Micro moulding; Polymer MEMS

Indexed keywords

MICROMACHINING; MOLDING; POLYMERS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON; SPIN COATING;

DEEP REACTIVE ION ETCHING; MECHANICAL INTERLOCKING; MICRO-MOLDING; POLYMER MEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646036386     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.215     Document Type: Article

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