메뉴 건너뛰기




Volumn 6107, Issue , 2006, Pages

Two-dimensional surface characterization of laser-deposited carbon films using Raman scattering

Author keywords

Carbon films; Confocal spatial filter; Raman mapping; Raman scattering; Surface characterization

Indexed keywords

CARBON FILMS; CONFOCAL SPATIAL FILTERS; RAMAN MAPPING; SURFACE CHARACTERIZATION;

EID: 33646005506     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.644974     Document Type: Conference Paper
Times cited : (7)

References (35)
  • 4
    • 84975594913 scopus 로고
    • Mapping materials properties with Raman spectroscopy utilizing a 2-D detector
    • D. Kirk Veirs, Joel W. Ager, Eric T. Loucks, and Gerd M. Rosenblatt, "Mapping materials properties with Raman spectroscopy utilizing a 2-D detector", Applied Optics, 29(33), 4969, (1990).
    • (1990) Applied Optics , vol.29 , Issue.33 , pp. 4969
    • Veirs, D.K.1    Ager, J.W.2    Loucks, E.T.3    Rosenblatt, G.M.4
  • 5
    • 0000922916 scopus 로고
    • A new confocal stigmatic spectrometer for micro-Raman and microfluorescence spectral imaging analysis: Design and applications
    • A. Feofanov, S. Sharonov, P. Valisa and E. Da Silva, I. Nabiev and M. Manfaitd, "A new confocal stigmatic spectrometer for micro-Raman and microfluorescence spectral imaging analysis: Design and applications", Rev. Sci. Instrum. 66 (5), 3146, (1995).
    • (1995) Rev. Sci. Instrum. , vol.66 , Issue.5 , pp. 3146
    • Feofanov, A.1    Sharonov, S.2    Valisa, P.3    Da Silva, E.4    Nabiev, I.5    Manfaitd, M.6
  • 7
    • 0027680418 scopus 로고
    • Automated resonance Raman spectroscopy
    • D. Wolverson and S. V. Railson, "Automated resonance Raman spectroscopy", Meas. Sci. Technol. 4, 1080, (1993)
    • (1993) Meas. Sci. Technol. , vol.4 , pp. 1080
    • Wolverson, D.1    Railson, S.V.2
  • 8
    • 0000410439 scopus 로고    scopus 로고
    • Development of a compact, handheld Raman instrument with no moving parts for use in field analysis
    • B. M. Cullum, J. Mobley, Z.H. Chi, D. L. Stokes, G. H. Miller, and T. Vo-Dinha, "Development of a compact, handheld Raman instrument with no moving parts for use in field analysis", Rev. Sci. Instrum. 71 (4), 1602, (2002).
    • (2002) Rev. Sci. Instrum. , vol.71 , Issue.4 , pp. 1602
    • Cullum, B.M.1    Mobley, J.2    Chi, Z.H.3    Stokes, D.L.4    Miller, G.H.5    Vo-Dinha, T.6
  • 9
    • 22744443048 scopus 로고    scopus 로고
    • Lens-scanning Raman micro-spectroscopy system using compact disc optical pickup technology
    • J.Y. Kim, G.L. Liu and L.P. Lee, "Lens-scanning Raman micro-spectroscopy system using compact disc optical pickup technology", Optics Express, 13(12), 4780, (2005).
    • (2005) Optics Express , vol.13 , Issue.12 , pp. 4780
    • Kim, J.Y.1    Liu, G.L.2    Lee, L.P.3
  • 10
    • 0000437506 scopus 로고    scopus 로고
    • Remote laser Raman microscopy (ReRaM): 1-design and testing of a confocal microprobe
    • A. Paipetis, C. Vlattas and C. Galiotis, "Remote Laser Raman Microscopy (ReRaM): 1-Design and Testing of a Confocal Microprobe", J. Raman Spectrosc. 27, 519, (1996).
    • (1996) J. Raman Spectrosc. , vol.27 , pp. 519
    • Paipetis, A.1    Vlattas, C.2    Galiotis, C.3
  • 11
    • 0000137240 scopus 로고    scopus 로고
    • Development of an in vivo spectroscopic Raman system for diagnostic applications
    • M.G. Shim and B. C. Wilson, "Development of an in vivo spectroscopic Raman system for diagnostic applications", J. Raman Spectrosc. 28, 131, (1997).
    • (1997) J. Raman Spectrosc. , vol.28 , pp. 131
    • Shim, M.G.1    Wilson, B.C.2
  • 12
    • 13544276367 scopus 로고    scopus 로고
    • Surface-enhanced Raman spectroscopy with a laser pointer light source and miniature spectrometer
    • M.A. Young, D.A. Stuart, O. Lyandres, M. R. Glucksberg, and R. P. Van Duyne, "Surface-enhanced Raman spectroscopy with a laser pointer light source and miniature spectrometer", Can. J. Chem. 82, 1435, (2004).
    • (2004) Can. J. Chem. , vol.82 , pp. 1435
    • Young, M.A.1    Stuart, D.A.2    Lyandres, O.3    Glucksberg, M.R.4    Van Duyne, R.P.5
  • 13
    • 21544433024 scopus 로고
    • Raman imaging with near-field scanning optical microscopy
    • C. L. Jahncke, M. A. Paesler, and H. D. Hallen, "Raman imaging with near-field scanning optical microscopy", Appl. Phys. Lett. 67 (17), 2483, (1995).
    • (1995) Appl. Phys. Lett. , vol.67 , Issue.17 , pp. 2483
    • Jahncke, C.L.1    Paesler, M.A.2    Hallen, H.D.3
  • 14
    • 0000226893 scopus 로고    scopus 로고
    • Nano-Raman spectroscopy and imaging with a near-field scanning optical microscope
    • C. L. Jahncke, H. D. Hallen and M. A. Paeslert, "Nano-Raman spectroscopy and imaging with a near-field scanning optical microscope", J. Raman Spectrosc. 27, 579, (1996).
    • (1996) J. Raman Spectrosc. , vol.27 , pp. 579
    • Jahncke, C.L.1    Hallen, H.D.2    Paeslert, M.A.3
  • 15
    • 0141483267 scopus 로고    scopus 로고
    • Near-field scanning Raman microscopy using apertureless probes
    • W. X. Sun and Z. X. Shen, "Near-field scanning Raman microscopy using apertureless probes", J. Raman Spectrosc. 34, 668, (2003).
    • (2003) J. Raman Spectrosc. , vol.34 , pp. 668
    • Sun, W.X.1    Shen, Z.X.2
  • 16
    • 0042977275 scopus 로고    scopus 로고
    • Raman micro-spectroscopy: A comparison of point, line, and wide-field imaging methodologies
    • S. Schlucker, M.D. Schaeberle, S.W. Huffman I.W. Levin, " Raman micro-spectroscopy: a comparison of point, line, and wide-field imaging methodologies", Anal Chem. 75(16), 4312, (2003).
    • (2003) Anal Chem. , vol.75 , Issue.16 , pp. 4312
    • Schlucker, S.1    Schaeberle, M.D.2    Huffman, S.W.3    Levin, I.W.4
  • 17
    • 0001583277 scopus 로고
    • Design and construction of a microscope-based Raman system
    • F. LaPlant and D.Ben-Amotz, "Design and construction of a microscope-based Raman system", Rev. Sci. Instrum. 66 (6), 3537, (1995).
    • (1995) Rev. Sci. Instrum. , vol.66 , Issue.6 , pp. 3537
    • LaPlant, F.1    Ben-Amotz, D.2
  • 20
    • 9744279393 scopus 로고
    • A carbon nanotube field-emission electron source
    • W. A. de Heer, A. Châtelain, and D. Ugarte, "A carbon nanotube field-emission electron source", Science, 270, 1179, (1995).
    • (1995) Science , vol.270 , pp. 1179
    • De Heer, W.A.1    Châtelain, A.2    Ugarte, D.3
  • 22
    • 0032492851 scopus 로고    scopus 로고
    • Carbon-based electronics
    • P.L. McEuen, "Carbon-based electronics", Nature, 393, 15, (1998).
    • (1998) Nature , vol.393 , pp. 15
    • McEuen, P.L.1
  • 24
    • 9744241090 scopus 로고    scopus 로고
    • Growth of carbon nanotubes by open-air laser-induced chemical vapor deposition
    • K. Kwok, W. K. S. Chiu, "Growth of carbon nanotubes by open-air laser-induced chemical vapor deposition", Carbon, 43, 437, (2005).
    • (2005) Carbon , vol.43 , pp. 437
    • Kwok, K.1    Chiu, W.K.S.2
  • 25
    • 1642587830 scopus 로고    scopus 로고
    • Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles
    • L.P. Li, Y.F. Lu, D.W. Doerr, D.R. Alexander, J. Shi, and J.C. Li, Fabrication of hemispherical cavity arrays on silicon substrates using laser-assisted nanoimprinting of self-assembled particles", Nanotechnology, 15, 333, (2004).
    • (2004) Nanotechnology , vol.15 , pp. 333
    • Li, L.P.1    Lu, Y.F.2    Doerr, D.W.3    Alexander, D.R.4    Shi, J.5    Li, J.C.6
  • 26
    • 10244257493 scopus 로고    scopus 로고
    • From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics
    • I. De Wolf and M. Rasras, "From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics", Eur. Phys. J. Appl. Phys. 27, 59, (2004).
    • (2004) Eur. Phys. J. Appl. Phys. , vol.27 , pp. 59
    • De Wolf, I.1    Rasras, M.2
  • 28
    • 0021522098 scopus 로고
    • The evaluation of the crystallinity of laser-annealed polycrystalline silicon-on-silicon structures by Raman-microprobe polarization measurements
    • S. Nakashima, Y. Inoue and A. Mitsuishi, "The evaluation of the crystallinity of laser-annealed polycrystalline silicon-on-silicon structures by Raman-microprobe polarization measurements", J. Appl. Phys. 56, 2989, (1984).
    • (1984) J. Appl. Phys. , vol.56 , pp. 2989
    • Nakashima, S.1    Inoue, Y.2    Mitsuishi, A.3
  • 29
    • 0030081591 scopus 로고    scopus 로고
    • Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits
    • I de Wolf, "Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits", Semicond. Sci. Technol. 11, 139, (1996).
    • (1996) Semicond. Sci. Technol. , vol.11 , pp. 139
    • De Wolf, I.1
  • 30
    • 0007604056 scopus 로고
    • Raman-microprobe study of stress and crystal orientation in laser-crystallized silicon
    • G. Kolb and Th. Salbert, G. Abstreiter, "Raman-microprobe study of stress and crystal orientation in laser-crystallized silicon", J. Appt. Phys. 69 (5), 3387, (1991).
    • (1991) J. Appt. Phys. , vol.69 , Issue.5 , pp. 3387
    • Kolb, G.1    Salbert, Th.2    Abstreiter, G.3
  • 31
    • 0010559728 scopus 로고    scopus 로고
    • Raman spectroscopy of phenylcarbyne polymer films under pulsed green laser irradiation
    • Y.F. Lu, S. M. Huang and Z. Sun, "Raman spectroscopy of phenylcarbyne polymer films under pulsed green laser irradiation", J. Appl. Phys. 87 (2), 945, (2000).
    • (2000) J. Appl. Phys. , vol.87 , Issue.2 , pp. 945
    • Lu, Y.F.1    Huang, S.M.2    Sun, Z.3
  • 33
    • 0028513408 scopus 로고
    • Raman fingerprinting of amorphous carbon films
    • M. A. Tamor and W. C. Vassell, "Raman fingerprinting of amorphous carbon films", J. Appl. Phys. 76 (6), 3823, (1994).
    • (1994) J. Appl. Phys. , vol.76 , Issue.6 , pp. 3823
    • Tamor, M.A.1    Vassell, W.C.2
  • 34
    • 0242603790 scopus 로고    scopus 로고
    • Interpretation of Raman spectra of disordered and amorphous carbon
    • A. C. Ferrari and J. Robertson, "Interpretation of Raman spectra of disordered and amorphous carbon", Physical Review B, 61(20), 14095, (2000).
    • (2000) Physical Review B , vol.61 , Issue.20 , pp. 14095
    • Ferrari, A.C.1    Robertson, J.2
  • 35
    • 0001755388 scopus 로고
    • Raman analysis of laser-annealed amorphous carbon films
    • M. Bowden, D. J. Gardiner, and J. M. Southall, "Raman analysis of laser-annealed amorphous carbon films", J. Appl. Phys. 71(1), 521, (1992).
    • (1992) J. Appl. Phys. , vol.71 , Issue.1 , pp. 521
    • Bowden, M.1    Gardiner, D.J.2    Southall, J.M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.