From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

EPJ Applied Physics

Volumn 27, Issue 1-3, 2004, Pages 59-65

  De Wolf, I ^a   Rasras, M ^b  

^a IMEC   (Belgium)

^b LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; FAILURE ANALYSIS; INTEGRATED CIRCUITS; PHONONS; PHOTONS; PRODUCT DESIGN; RAMAN SPECTROSCOPY; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

MICRO-RAMAN SPECTROSCOPY (ΜRS); PHONON FREQUENCIES; PHOTON EMISSION MICROSCOPY (PEM); SEMICONDUCTOR-DEVICE CHARACTERIZATION;

MICROELECTRONICS;

EID: 10244257493     PISSN: 12860042     EISSN: None     Source Type: Journal    
DOI: 10.1051/epjap:2004073     Document Type: Conference Paper

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